Microfabricated high aspect ratio silicon flexures by Christopher G Keller, G. Keller — Oulie

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Microfabricated high aspect ratio silicon flexures

Cover of Microfabricated high aspect ratio silicon flexures

Microfabricated high aspect ratio silicon flexures

by Christopher G Keller, G. Keller

1998·356 pages·en

Publisher, ISBN & more▾

Publisher: MEMS Precision Instruments
ISBN: 9780966637601

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